RHP300PA is a special case of the rapid thermal processing Lamp Module which can be used for
high temperature Single substrate Process.
To improve temperature uniformity in wafer more than 160℃ at Nitride Etching Process,
RHP300PA is integrated with Wet clean process equipment.
Application
ㆍLamp heater module for SPM
ㆍLamp heater module for H3PO4
ㆍWet Etching Process
- 4chambers configuration
ㆍ8chambers configuration.
Specification
ㆍTemperature Control Range : 0℃ ~ 300℃
ㆍTemperature sensor accuracy : < ±0.5℃
ㆍTemp. control accuracy : < ±1.5℃
ㆍRamp up rate : 30℃/sec (Dry condition)
ㆍTemperature uniformity : < ±6.0℃
ㆍPressure environment : ATM Process
ㆍProcess Material : 300mm Silicon Wafer
Light can defined as an electromagnetic wave within the range of 100nm ~ 100,000nm(1mm). The boundaries for the spectrum for visible light are 380nm-750nm ; IR radiation is divided up into Near-Wave, Intermediate-Wave, and Far-Wave Infrared Radiation. Near-Wave is less than 2,000nm, Intermediate-Wave is between 2,000 and 4,000nm, and Far-Wave IR is above 4,000nm.
We can select the right electromagnetic waves based on each material’s radiation & absorption rate in order to produce the optimal product of Halogen Lamp(Quartz Infrared Heater Lamp).
Application
ㆍVacuum environment of Roll to Roll Equipment
ㆍProtect the surface of PE, PP, PET films in process of using special infrared ray wavelength
System features
ㆍHigh Efficiency
The lamp envelope is of quartz glass. The compact bulb supplies a high luminous output per watt. “Halogen Cycle” minimizes evaporation of the tungsten filament.
ㆍStable Color Temperature
Thanks to the “Halogen Cycle” – a chemical reaction whereby evaporated tungsten particles are returned to the filament – blacking of the bulb wall and thinning of the tungsten filament are kept to a minimum. Light intensity and color temperature remain stable throughout the life of the lamp.
ㆍLong Life
The “Halogen Cycle” guarantees extremely long lamp life. Service life is about twice that of an ordinary incandescent lamp.
ㆍThermal shock Resistance
With their quartz glass envelope, halogen lamps are much more resistance to heat impact than ordinary incandescent lamps.
ㆍWarm up and Cool down
When quartz Infrared heater lamp turned on, it will be able to achieve its maximum radiation(heat energy) in the shortest time when compared with other heaters  The length of time it takes to achieve the maximum radiation output is 40-50seconds. It also has a rapid cool down when the lamp is switched off.
Temperature Controller What is DSP?
Digital signal processing generally involves the mathematical processing of data, usually in the form of voltage level samples. Computer processors and other electronics are often used to incorporate DSP into various applications. Digital Signal Processing is often used is the digital signal converter. It can convert signals from analog to digital formats, which is sometimes performed on input signals to sample them and calculate a numerical value. RTP System of NPS is used to incorporate into temperature control applications.
Application
ㆍGathering Information(Communication)
ㆍMedical, or Scientific Equipment , Semiconductor Equipment, and other electronics
ㆍRTP Temp control
ㆍPID control
System features
ㆍAI : 16channel (DC0~10V, 4~20mA), D I/O : 12channel
ㆍEther Net, CAN, RS232/485 communication protocol
ㆍTo extend AI/O channel through CAN communication
ㆍReceive the analog signal(DC0~10V, 4~20mA) from Pyrometer or, Thermocouples, then convert it to the digital formats, which was applied to PID gain, and then send this signal to Power controller via CAN or DAC IO Board