RHP470V CIGS is the rapid thermal processing system, and it is processing to anneal Mo coated glass substrate
which is a stacked of Cu, In, and Ga is sputter-deposited.
Then Selenization takes place under H2Se(CIGS). To avoid the use of the toxic H2Se during selenization,
Our Rapid Heating Process System can be used to obtain the highest efficiencies in S-containing atmosphere (either pure S or H2S).
Application
ㆍRTA
ㆍHigh temperature anneal capability
ㆍLow temperature process capability
ㆍMetal & glass substrates,
ㆍMo-coated glass substrates
ㆍ□200 X 200 / □300 X 300 / □370 X 470
Specification
ㆍTemperature sensor accuracy : < ±0.5℃
ㆍTemp. control accuracy : < ±1.5℃
ㆍProcess temperature range : 100℃ ~ 700℃
ㆍRamp up & down rate : 10℃/sec & 4℃/sec
ㆍMetal contamination : < 1+E10 atoms/㎠
ㆍRTA uniformity : < ±5.0℃
ㆍPressure environment : ATM, Vacuum
System features
ㆍQualified performance and reliability in production
ㆍDual Lamp arrayed in Heater block (Linear shaped tungsten Halogen lamp arrayed)
ㆍ3 points temperature measurement by thermo-couples
ㆍLower CoO and CoC
ㆍLamp seal tube configuration(no quartz window)
ㆍTop to bottom gas flow
ㆍSemi-auto transfer module
ㆍProduction proven Equipment control software
RHP Infinity is a Lamp Heater Module for larger reaction chamber.
It is a substrate heating assembly in high vacuum reaction chamber, and the role of NPSTM RHP Infinity is to provide a
temperature rise, steady-state, and down of substrate, especially it is used for pre-heating of substrate in PECVD System.
RHP Infinity has integrated with temperature controller, equipped our own DSP board and Power control board which is
showing stable temperature profile and thermal uniformity.
Application
ㆍPreheating for Si thin film Solar Cell
ㆍLamp heating Technology for LCD and Solar Cell
ㆍLoad Lock Heater for PECVD
Specification
ㆍDimension(mm) : W(614) x D(1500) x H(67)
ㆍTemperature Control Range : 450℃ ±3.5%
ㆍRamp up rate : 2℃/sec
ㆍPressure environment : ATM, VAC Process
System features
ㆍBig Size Lamp Heater : Max 2000mm in Length
ㆍSingle layer or Double layer Lamp Heating (Linear Type Tungsten Halogen Lamp Array)
ㆍTemperature Control : Thermo-Couples or Pyrometer
ㆍWall Side : Water Cooling