Local Patent(Domestic) | International patent | Technology Certification | Certificates |
NO. | Patent Number |
Name of Invention | Date of registration |
Certification authority |
View |
---|---|---|---|---|---|
1 | #10-0858439 | Tungsten halogen lamp which processed a sealing flange | September 08,2008 | KIPO | View |
2 | #10-0902633 | Heating unit and substrate processing apparatus therewith | June 05,2009 | KIPO | View |
3 | #10-0906711 | Rapid thermal process apparatus | July 01,2009 | KIPO | View |
4 | #10-0910206 | Susceptor processing apparatus and the processing method thereof | July 24,2009 | KIPO | View |
5 | #10-0940544 | Unit for supporting substrate | January 28,2010 | KIPO | View |
6 | #10-0954859 | Temperature measuring apparatus | April 19,2010 | KIPO | View |
7 | #10-0963820 | Vacuum chamber and method for manufacturing the same | June 08,2010 | KIPO | View |
8 | #10-0965143 | Susceptor unit and apparatus for processing a substrate using it | June 14,2010 | KIPO | View |
9 | #10-0990237 | Apparatus for processing substrate and method for processing substrate using it | October 20,2010 | KIPO | View |
10 | #10-0990746 | Apparatus for processing a substrate | October 22,2010 | KIPO | View |
11 | #10-0990747 | Substrate processing apparatus | October 22,2010 | KIPO | View |
12 | #10-0990745 | Apparatus for processing substrate and method for processing substrate using it | October 22,2010 | KIPO | View |
13 | #10-0993864 | Substrate processing apparatus | November 05,2010 | KIPO | View |
14 | #10-1002748 | Susceptor unit and thermal process apparatus of substrate with it | December 14,2010 | KIPO | View |
15 | #10-1155026 | Apparatus for process substrate and the method for processing substrate the same | June 04,2012 | KIPO | View |
16 | #10-1182638 | Apparatus for processing a substrate | September 07,2012 | KIPO | View |
17 | #10-1190603 | Substrate processing apparatus | October 08,2012 | KIPO | View |
18 | #10-1193569 | Heater and substrate processing apparatus having the same | October 16,2012 | KIPO | View |
19 | #10-1193570 | Apparatus for processing a substrate | October 16,2012 | KIPO | View |
20 | #10-1217638 | Substrate supporting apparatus and substrate processing apparatus having the same | December 26,2012 | KIPO | View |
21 | #10-1224059 | Substrate processing apparatus and the method thereof | January 14,2013 | KIPO | View |
22 | #10-1232770 | Apparatus for processing a substrate | February 06,2013 | KIPO | View |
23 | #10-1254253 | Apparatus for process substrate and method for processing substrate using the same | April 08,2013 | KIPO | View |
24 | #10-1355644 | Substrate processing apparatus | January 20,2014 | KIPO | View |
25 | #10-1362810 | Thermal process apparatus | February 07,2014 | KIPO | View |
26 | #10-1431606 | Substrate processing apparatus | August 12,2014 | KIPO | View |
27 | #10-1431607 | Apparatus for process substrate and method for processing substrate using the same | August 12,2014 | KIPO | View |
28 | #10-1472484 | Apparatus for processing a substrate | December 08,2014 | KIPO | View |
29 | #10-1500546 | Substrate supporting apparatus and substrate treatment apparatus including the same | March 038,2015 | KIPO | View |
Local Patent(Domestic) | International patent | Technology Certification | Certificates |
NO. | Patent Number |
Name of Invention | Date of registration |
Certification authority |
View |
---|---|---|---|---|---|
1 | ZL 2010 1 0528673.6 | SUSCEPTOR UNIT AND APPARATUS FOR PROCESSING SUBSTRATE USING THE SAME | November 13,2013 | SIPO | View |
2 | I 442510 | SUSCEPTOR UNIT AND APPARATUS FOR PROCESSING SUBSTRATE USING THE SAME | June 21,2014 | TIPO | View |
Local Patent(Domestic) | International patent | Technology Certification | Certificates |
NO. | Patent Number |
Name of Invention | Date of registration |
Certification authority |
View |
---|---|---|---|---|---|
1 | F690501/SP-IMS000886 | Rapid Thermal Process System_RHP620 | October 11,2011 | SGS Korea Co., Ltd | View |
2 | K5356/M12 | Lamp Module_RHP300 | November 13,2012 | TUV NORD Korea | View |
3 | K5356/M12 | RTP System_RHP640AV | August 12,2013 | TUV NORD Korea | View |
Local Patent(Domestic) | International patent | Technology Certification | Certificates |
NO. | Patent Number |
Name of Invention | Date of registration |
Certification authority |
View |
---|---|---|---|---|---|
1 | #20160104470 | Venture Business Confirmation | April 03,2016 | Korea Technology Finance Corporation | View |
2 | #R100601-00620 | "“INNO-BIZ” Certificate (Technology Innovation Company) | April 21,2016 | Small & Medium Business Administration | View |
3 | #2010111631 | Certificate of Company R & D Center | June 04,2010 | Korea Industrial Technology Association | View |
4 | #2011-148 | Selected as a promising enterprise 2011 | September 01,2011 | The Governor of Gyeonggi-do | View |
5 | #2015.01.01 ~2015.12.31 |
Certificate of small hidden champion in Korea | January 01,2015 | Ministy of Employment and Labor | View |